thermcopoly status

maurice stevens maurice at stanford.edu
Wed Nov 15 09:27:35 PST 2006


Thermco poly has an issue with satisfying interlocks that let the gases 
flow.  Ted and his crew are working on it (along with epi burn box, epi 
isolation valve, new AMAT mfc change, the TEL instillation...).  Thermco 
poly is not currently at the top of the priority list, but it will be 
addressed as soon as time allows.

We will update you when we have more information.

-m

-- 
maurice at stanford.edu

Maurice Stevens
Stanford Nanofabrication Facility
CIS Room 142, Mail Code 4070
Stanford, CA  94305
P. (650)725-3660
F. (650)725.6278




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