From robinhmb at yahoo.com  Thu Aug  6 08:17:52 2009
From: robinhmb at yahoo.com (Robin King)
Date: Thu, 6 Aug 2009 08:17:52 -0700 (PDT)
Subject: thermcopoly1 is free this afternoon
Message-ID: <334030.43513.qm@web111505.mail.gq1.yahoo.com>

hung up at etch


From fanpy839 at stanford.edu  Thu Aug 13 19:01:33 2009
From: fanpy839 at stanford.edu (Pengyu Fan)
Date: Thu, 13 Aug 2009 19:01:33 -0700 (PDT)
Subject: leakfail problem shutdown
In-Reply-To: <1771854453.543611250215218976.JavaMail.root@zm01.stanford.edu>
Message-ID: <1041498165.543741250215293028.JavaMail.root@zm01.stanford.edu>

Hi All,

There is a leakfail problem.

When I came on the tool, it said "leakfail" during STBYPOLY started by previous user. When I was running my recipe for the first time, it still said "leakfail". I then did boat cal and tried again. Same problem. 

It didn't even go to the leak check step yet, "leakfail" showed up at the end of base pressure step and at that time, the tube pressure is still above 1000mTorr, looking like it's not even been pumped at all.

Best,
Pengyu