leakfail problem shutdown

Pengyu Fan fanpy839 at stanford.edu
Thu Aug 13 19:01:33 PDT 2009

Hi All,

There is a leakfail problem.

When I came on the tool, it said "leakfail" during STBYPOLY started by previous user. When I was running my recipe for the first time, it still said "leakfail". I then did boat cal and tried again. Same problem. 

It didn't even go to the leak check step yet, "leakfail" showed up at the end of base pressure step and at that time, the tube pressure is still above 1000mTorr, looking like it's not even been pumped at all.


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