From fanpy839 at stanford.edu  Wed Sep  2 13:38:20 2009
From: fanpy839 at stanford.edu (Pengyu Fan)
Date: Wed, 2 Sep 2009 13:38:20 -0700 (PDT)
Subject: Doping level?
Message-ID: <1820563200.1367971251923900912.JavaMail.root@zm01.stanford.edu>

Hi All,

Does anybody have any information about the doping concentration for different recipes on this tool with different PH3/B2H6 flow? Or is there any way to get that information from the resistivity data?

Thanks a lot!

Best,
Pengyu


From eap at gloworm.Stanford.EDU  Wed Sep  2 16:16:19 2009
From: eap at gloworm.Stanford.EDU (Eric Perozziello)
Date: Wed, 2 Sep 2009 16:16:19 -0700 (PDT)
Subject: Doping level?
In-Reply-To: <1820563200.1367971251923900912.JavaMail.root@zm01.stanford.edu>
Message-ID: <Pine.GSO.4.44.0909021615120.6455-100000@gloworm.Stanford.EDU>


Check:

http://www.lelandstanfordjunior.com/eData.html

user: data
passwd: coop

I think the B2H6 source has been changed since most of this data
was collected, so your results may vary.

-Eric


On Wed, 2 Sep 2009, Pengyu Fan wrote:

> Hi All,
>
> Does anybody have any information about the doping concentration for different recipes on this tool with different PH3/B2H6 flow? Or is there any way to get that information from the resistivity data?
>
> Thanks a lot!
>
> Best,
> Pengyu
>



From robinhmb at yahoo.com  Mon Sep 21 18:14:34 2009
From: robinhmb at yahoo.com (Robin King)
Date: Mon, 21 Sep 2009 18:14:34 -0700 (PDT)
Subject: Thermcopoly1 is free till 9:30pm
Message-ID: <310539.65999.qm@web111505.mail.gq1.yahoo.com>