Doping level?

Pengyu Fan fanpy839 at stanford.edu
Wed Sep 2 13:38:20 PDT 2009


Hi All,

Does anybody have any information about the doping concentration for different recipes on this tool with different PH3/B2H6 flow? Or is there any way to get that information from the resistivity data?

Thanks a lot!

Best,
Pengyu



More information about the thermcopoly1 mailing list