Doping level?

Eric Perozziello eap at gloworm.Stanford.EDU
Wed Sep 2 16:16:19 PDT 2009


Check:

http://www.lelandstanfordjunior.com/eData.html

user: data
passwd: coop

I think the B2H6 source has been changed since most of this data
was collected, so your results may vary.

-Eric


On Wed, 2 Sep 2009, Pengyu Fan wrote:

> Hi All,
>
> Does anybody have any information about the doping concentration for different recipes on this tool with different PH3/B2H6 flow? Or is there any way to get that information from the resistivity data?
>
> Thanks a lot!
>
> Best,
> Pengyu
>




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