Doping level?

Eric Perozziello eap at gloworm.Stanford.EDU
Wed Sep 2 16:16:19 PDT 2009


user: data
passwd: coop

I think the B2H6 source has been changed since most of this data
was collected, so your results may vary.


On Wed, 2 Sep 2009, Pengyu Fan wrote:

> Hi All,
> Does anybody have any information about the doping concentration for different recipes on this tool with different PH3/B2H6 flow? Or is there any way to get that information from the resistivity data?
> Thanks a lot!
> Best,
> Pengyu

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