From maurice at stanford.edu  Fri Apr  9 16:36:23 2010
From: maurice at stanford.edu (maurice stevens)
Date: Fri, 09 Apr 2010 16:36:23 -0700
Subject: ThermcoPoly1/Thermcopoly2 update
Message-ID: <4BBFB9F7.7020603@stanford.edu>

New Proposal:
 
ThermcoPoly1 will stay a clean furnace.
The hardware needed to bring Ge to the tube has been installed.  We are 
in the process of bringing the Ge recipes over and need to test them.
Ge users will be required to run an undoped poly coat program in the 
tube after Ge or SiGe depositions (normal practice on TylanSiGe for years).
Doped silicon users will be required to run an undoped poly coat program 
in the tube after doped depositions (we should have been doing this 
already).

ThermcoPoly2 will become the "gold" tube.  This will effect ~6 users.  
Only 2 of them have used Ge this year.
We would like to switch ThermcoPoly2 next Wed.

Please email back any comments, criticisms or compliments to Ed or myself.

-m

-- 
maurice at stanford.edu

Maurice Stevens
Stanford Nanofabrication Facility
CIS Room 142, Mail Code 4070
Stanford, CA  94305
P. (650)725-3660
F. (650)725.6278



From maurice at stanford.edu  Thu Apr 15 09:21:06 2010
From: maurice at stanford.edu (Maurice Stevens)
Date: Thu, 15 Apr 2010 09:21:06 -0700
Subject: important: POLYCOAT required!
Message-ID: <4BC73CF2.8060005@stanford.edu>

All doped poly, SiGe and Ge users are now required to coat the tube 
after their depositions.

There is a POLYCOAT recipe that will put .5 micron of undoped silicon on 
the tube, boats and dummies.

Log your run in the logbook as normal and then also log in the coat 
deposition.

Make sure you reserve enough time on coral to cover your deposition and 
the coat deposition.  The coat will take about 1.5 hours.

This means that the tube could be holding in the STBYPOLY or POLYCOAT 
recipes when you come to the tube to use it.


From maurice at snf.stanford.edu  Tue Apr 20 12:22:02 2010
From: maurice at snf.stanford.edu (Maurice Stevens)
Date: Tue, 20 Apr 2010 12:22:02 -0700
Subject: ThermcoPoly1 free until 5pm
Message-ID: <4BCDFEDA.3020402@snf.stanford.edu>