important: POLYCOAT required!
maurice at stanford.edu
Thu Apr 15 09:21:06 PDT 2010
All doped poly, SiGe and Ge users are now required to coat the tube
after their depositions.
There is a POLYCOAT recipe that will put .5 micron of undoped silicon on
the tube, boats and dummies.
Log your run in the logbook as normal and then also log in the coat
Make sure you reserve enough time on coral to cover your deposition and
the coat deposition. The coat will take about 1.5 hours.
This means that the tube could be holding in the STBYPOLY or POLYCOAT
recipes when you come to the tube to use it.
More information about the thermcopoly1