From maurice at stanford.edu Thu Aug 12 17:27:22 2010 From: maurice at stanford.edu (maurice) Date: Thu, 12 Aug 2010 17:27:22 -0700 Subject: Thermco Burnbox update Message-ID: <4C64916A.30407@stanford.edu> Ted says the burnbox is close to being put back together. He is waiting for a couple of parts to come in to complete the rebuild. He expect the parts will arrive tomorrow. If they come in early enough the burn box and the Thermco LPCVD systems maybe up late tomorrow. We will send an update tomorrow. -m From cchen86 at stanford.edu Mon Aug 16 09:10:27 2010 From: cchen86 at stanford.edu (Chen Chen) Date: Mon, 16 Aug 2010 09:10:27 -0700 Subject: Reservation released, Monday 15:00pm - Tue 7am Message-ID: Samples are not ready. Chen -------------- next part -------------- An HTML attachment was scrubbed... URL: From maurice at stanford.edu Wed Aug 18 10:19:27 2010 From: maurice at stanford.edu (maurice stevens) Date: Wed, 18 Aug 2010 10:19:27 -0700 Subject: Phospine source for thermcopoly1 In-Reply-To: References: Message-ID: <4C6C161F.8030000@stanford.edu> As of yesterday the phosphine bottle was in Sacramento. We are hoping to get it today. Once we get the bottle we will install it and do a 24 hour leak check. We will send an email once the bottle is online. -m Scott Lee wrote: > Hi Maurice, > > Do you know if the phospine source for thermcopoly1 has been > replaced? Coral says a new bottle should have come in on 7/29 but > there is no update as to whether or not it was replaced. > > Thanks, > Scott -- maurice at stanford.edu Maurice Stevens Stanford Nanofabrication Facility CIS Room 142, Mail Code 4070 Stanford, CA 94305 P. (650)725-3660 F. (650)725.6278 From maurice at stanford.edu Tue Aug 24 09:22:16 2010 From: maurice at stanford.edu (maurice stevens) Date: Tue, 24 Aug 2010 09:22:16 -0700 Subject: PH3 is back on Thermcopoly1/2 Message-ID: <4C73F1B8.9090401@stanford.edu> Ray put the following on Coral: -------- Original Message -------- Subject: Re: Problem thermcopoly2 SNF 2010-07-22 12:15:48: 15% Phosphine/Silane cylinder very near empty. Date: Tue, 24 Aug 2010 07:11:51 -0700 From: seymour at snf.stanford.edu To: thermcopoly2-pcs at snf.stanford.edu cylinder has been installed and passed leak check. line charged with phosphine/silane -- maurice at stanford.edu Maurice Stevens Stanford Nanofabrication Facility CIS Room 142, Mail Code 4070 Stanford, CA 94305 P. (650)725-3660 F. (650)725.6278