ThermcoPoly1 up
maurice stevens
maurice at stanford.edu
Fri Dec 10 15:06:01 PST 2010
from coral:
-------- Original Message --------
Subject: Re: Shutdown thermcopoly1 SNF 2010-12-07 15:18:32: Poly tube
broken
Date: Fri, 10 Dec 2010 14:06:26 -0800
From: maurice at snf.stanford.edu
To: thermcopoly1-pcs at snf.stanford.edu
Tube, paddle and most quartz replaced. Coated and tested.
Dep rate is a little lower than the last test. Users should run a test before running a critical deposition.
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