ThermcoPoly1 going gold
edmyers at stanford.edu
Tue Mar 9 16:49:37 PST 2010
I am receiving your emails and I hear your concerns. I know
transitions like this are difficult and how impossible it is to find
the perfect time. We are not out to jeopardize your work, but we are
trying to support the lab members who for years have been asking for
more capability in processing substrates in the gold contaminated category.
The intention of the earlier email was to remind everyone one the
change is coming. Maurice has been working on gathering data on
Thermcopoly2. We must get a complete set of data, have it published
and have it reviewed by the lab member community before the
change. I will be gathering the data out of Thermcopoly2 and will
monitor the progress in Maurice's absence. But be clear, the
objective is to provide poly processing support for non-clean or gold
contaminated substrates. This means one of the poly tubes has to
change. From the emails, it seems like the end of March should be
the target for the conversion if we meet the criteria mentioned
above. Out of fairness to the projects which are waiting for the
conversion, we do need to set a target date. The number of current
Thermcopoly1 users who are impacted by this change is similar to the
number of lab members who are waiting.
At 10:34 AM 3/9/2010, Ed Myers wrote:
>I want to remind everyone that ThermcoPoly1 will transition over to
>gold contaminated on Monday, March 15th.
>Since Maurice is out of the office, please let Nancy or Ed know if
>you have any concerns.
>At 12:19 PM 3/3/2010, maurice stevens wrote:
>>ThermcoPoly1 is tentatively scheduled to become a gold contaminated
>>furnace March 15th.
>>All clean doped poly with move over to Thermcopoly2. The tubes
>>operate exactly the same (except that ThermcoPoly2 has not had any
>>boat calibration issues). All the standard recipes are on both.
>>We expect to have the doping/growth rate charts finished by that time.
>>You are free to start using ThermcoPoly2 now and I have already
>>added many of you to the ThermcoPoly2 qualification list. If you
>>didn't get a qualification let me ( or Ed/Nancy/Mary) know and we will add you.
>>Why is ThermcoPoly2 the clean tube? Both ThermcoPoly tubes can
>>deposited doped films but only ThermcoPoly2 is plumbed with Ge. It
>>is our only "clean" doped Ge tube so it could not become the "gold" tube.
>>If you have comments or concerns or compliments, let me know.
>>maurice at stanford.edu
>>Stanford Nanofabrication Facility
>>CIS Room 142, Mail Code 4070
>>Stanford, CA 94305
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