thermco1poly up

maurice stevens maurice at stanford.edu
Fri Feb 25 22:28:26 PST 2011


Tube replaced and coated.
Test complete
P580POLY   00:23:30
expected 900Ang
actual 970 

The dep rate is a little higher than before the tube was replaced.  If you thickness is critical, we recommend running a test for your thickness before committing your real wafers.


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