0.5um doped poly-Si

Hector Cavazos hector at AsylumResearch.com
Mon Sep 12 12:36:43 PDT 2011

I'm a new user to THERMCOPOLY1 and was wondering if anyone can suggest a recipe and time for ~ 0.5um of doped poly-Si in this tube?  Either P- or N-type is fine and doping to as high level as possible.

I poked around the website and didn't see any data logs and the curves in the books seem a bit old.


Hector Cavazos
Asylum Research

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