From jrjain at snf.stanford.edu  Mon Jan 21 17:15:59 2008
From: jrjain at snf.stanford.edu (jrjain at snf.stanford.edu)
Date: Mon, 21 Jan 2008 17:15:59 -0800
Subject: Problem thermcopoly2 SNF 2008-01-21 17:15:59: No SiH4
Message-ID: <mailman.5.1356283591.4893.thermcopoly2-pcs@snf.stanford.edu>

SiH4 flow 0 for 150sccm setpoint.  EricP and I checked the gas gauge near tylanbpsg.  Reading indicated empty.



From jrjain at snf.stanford.edu  Tue Jan 22 00:10:32 2008
From: jrjain at snf.stanford.edu (jrjain at snf.stanford.edu)
Date: Tue, 22 Jan 2008 00:10:32 -0800
Subject: Problem thermcopoly2 SNF 2008-01-22 00:10:32: No Ge Deposition
Message-ID: <mailman.6.1356283591.4893.thermcopoly2-pcs@snf.stanford.edu>

Ran recipe with 50sccm GeH4 for 01:00:00.  Wafers and cantilever show no deposition.  Also had problem with SiH4 seed layer preceding Ge deposition (see earlier post about low SiH4 flow).



From maurice at snf.stanford.edu  Tue Jan 22 15:11:57 2008
From: maurice at snf.stanford.edu (maurice at snf.stanford.edu)
Date: Tue, 22 Jan 2008 15:11:57 -0800
Subject: Comment thermcopoly2 SNF 2008-01-22 15:11:56: Ge testing
Message-ID: <mailman.7.1356283591.4893.thermcopoly2-pcs@snf.stanford.edu>




From maurice at snf.stanford.edu  Wed Jan 23 09:27:21 2008
From: maurice at snf.stanford.edu (maurice at snf.stanford.edu)
Date: Wed, 23 Jan 2008 09:27:21 -0800
Subject: Problem thermcopoly2 SNF 2008-01-21 17:15:59: No SiH4
Message-ID: <mailman.8.1356283591.4893.thermcopoly2-pcs@snf.stanford.edu>

gases back on



From maurice at snf.stanford.edu  Wed Jan 23 09:27:26 2008
From: maurice at snf.stanford.edu (maurice at snf.stanford.edu)
Date: Wed, 23 Jan 2008 09:27:26 -0800
Subject: Problem thermcopoly2 SNF 2008-01-22 00:10:32: No Ge Deposition
Message-ID: <mailman.9.1356283591.4893.thermcopoly2-pcs@snf.stanford.edu>

gases back on



From jrjain at snf.stanford.edu  Thu Jan 24 20:05:31 2008
From: jrjain at snf.stanford.edu (jrjain at snf.stanford.edu)
Date: Thu, 24 Jan 2008 20:05:31 -0800
Subject: Problem thermcopoly2 SNF 2008-01-24 20:05:31: HSP Fail and other faults
Message-ID: <mailman.10.1356283591.4893.thermcopoly2-pcs@snf.stanford.edu>

During PSEED Step of GEV1 recipe.
SiH4 setpoint was 200sccm.  Actual flow was 1sccm.
Pressure setpoint was 200mTorr.  Actual pressure was 27mTorr.



From tberg at snf.stanford.edu  Mon Jan 28 07:05:26 2008
From: tberg at snf.stanford.edu (tberg at snf.stanford.edu)
Date: Mon, 28 Jan 2008 07:05:26 -0800
Subject: Problem thermcopoly2 SNF 2008-01-24 20:05:31: HSP Fail and other faults
Message-ID: <mailman.11.1356283591.4893.thermcopoly2-pcs@snf.stanford.edu>

Added oil to pump pressure is fine now



From jrjain at snf.stanford.edu  Wed Jan 30 10:30:07 2008
From: jrjain at snf.stanford.edu (jrjain at snf.stanford.edu)
Date: Wed, 30 Jan 2008 10:30:07 -0800
Subject: Problem thermcopoly2 SNF 2008-01-30 10:30:06: Computer not responding
Message-ID: <mailman.12.1356283591.4893.thermcopoly2-pcs@snf.stanford.edu>

blue screen...



From tberg at snf.stanford.edu  Wed Jan 30 11:19:37 2008
From: tberg at snf.stanford.edu (tberg at snf.stanford.edu)
Date: Wed, 30 Jan 2008 11:19:37 -0800
Subject: Problem thermcopoly2 SNF 2008-01-30 10:30:06: Computer not responding
Message-ID: <mailman.13.1356283591.4893.thermcopoly2-pcs@snf.stanford.edu>

Reset compouter and Monitor