Problem thermcopoly2 SNF 2008-01-21 17:15:59: No SiH4

jrjain at snf.stanford.edu jrjain at snf.stanford.edu
Mon Jan 21 17:15:59 PST 2008


SiH4 flow 0 for 150sccm setpoint.  EricP and I checked the gas gauge near tylanbpsg.  Reading indicated empty.




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