Problem thermcopoly2 SNF 2008-01-22 00:10:32: No Ge Deposition

[jrjain at snf.stanford.edu]

Ran recipe with 50sccm GeH4 for 01:00:00.  Wafers and cantilever show no deposition.  Also had problem with SiH4 seed layer preceding Ge deposition (see earlier post about low SiH4 flow).