Problem thermcopoly2 SNF 2008-01-22 00:10:32: No Ge Deposition

jrjain at snf.stanford.edu jrjain at snf.stanford.edu
Tue Jan 22 00:10:32 PST 2008


Ran recipe with 50sccm GeH4 for 01:00:00.  Wafers and cantilever show no deposition.  Also had problem with SiH4 seed layer preceding Ge deposition (see earlier post about low SiH4 flow).




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