Problem thermcopoly2 SNF 2008-01-24 20:05:31: HSP Fail and other faults

jrjain at snf.stanford.edu jrjain at snf.stanford.edu
Thu Jan 24 20:05:31 PST 2008


During PSEED Step of GEV1 recipe.
SiH4 setpoint was 200sccm.  Actual flow was 1sccm.
Pressure setpoint was 200mTorr.  Actual pressure was 27mTorr.




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