From king at snf.stanford.edu Sat Jul 12 11:13:27 2008 From: king at snf.stanford.edu (king at snf.stanford.edu) Date: Sat, 12 Jul 2008 11:13:27 -0700 Subject: Comment thermcopoly2 SNF 2008-07-12 11:13:26: Needs basic characterization Message-ID: I did a test run with the same time and process (P580PH3) as Thermcopoly 1 and the dep rate was only about 55%. It was also very nonuniform across the wafer. This tube needs work before charging people to use it. From emyers at snf.stanford.edu Sat Jul 12 18:53:44 2008 From: emyers at snf.stanford.edu (emyers at snf.stanford.edu) Date: Sat, 12 Jul 2008 18:53:44 -0700 Subject: Shutdown thermcopoly2 SNF 2008-07-12 18:53:44: Needs startup after power glitch Message-ID: From tberg at snf.stanford.edu Mon Jul 14 08:11:19 2008 From: tberg at snf.stanford.edu (tberg at snf.stanford.edu) Date: Mon, 14 Jul 2008 08:11:19 -0700 Subject: Shutdown thermcopoly2 SNF 2008-07-12 18:53:44: Needs startup after power glitch Message-ID: Restarted pump . put system back in stbypoly. looks fine now From maurice at snf.stanford.edu Mon Jul 14 16:29:56 2008 From: maurice at snf.stanford.edu (maurice at snf.stanford.edu) Date: Mon, 14 Jul 2008 16:29:56 -0700 Subject: Problem thermcopoly2 SNF 2008-07-14 16:29:55: NON UNIFORM DEP/LOW GROWTHRATE REPORTED Message-ID: Robin King reports: I did a test run with the same time and process (P580PH3) as Thermcopoly 1 and the dep rate was only about 55%. It was also very nonuniform across the wafer. This tube needs work before charging people to use it. From jrjain at snf.stanford.edu Wed Jul 30 23:19:08 2008 From: jrjain at snf.stanford.edu (jrjain at snf.stanford.edu) Date: Wed, 30 Jul 2008 23:19:08 -0700 Subject: Shutdown thermcopoly2 SNF 2008-07-30 23:19:07: Pressure Problems Message-ID: During Base, pressure at 1179 mTorr. Failed leak check. From shott at snf.stanford.edu Wed Jul 30 23:43:13 2008 From: shott at snf.stanford.edu (shott at snf.stanford.edu) Date: Wed, 30 Jul 2008 23:43:13 -0700 Subject: Shutdown thermcopoly2 SNF 2008-07-30 23:43:13: Seized pump, I fear .... Message-ID: Raja asked me to see if the pumps were running when he encountered pumping problems on thermcopoly2. When I got down there: 1. Pumps were not running ... 2. The blower had been off long enough that it was at room temp. 3. The backing pump was trying to restart itself every 8-10 seconds and would buzz for a couple of seconds and then stop. Faint electrical burning smell and the electric motor was very hot to the touch .... hotter than if it had actually been running normally. 4, On the end of the pump body the oil level light was red. I pushed the orange buttons (facing the welding bench) to turn off both the blower and the pump so that it would stop trying to restart itself. I fear that we may have a siezed pump on our hands .... John