Problem thermcopoly2 SNF 2008-07-14 16:29:55: NON UNIFORM DEP/LOW GROWTHRATE REPORTED

maurice at snf.stanford.edu maurice at snf.stanford.edu
Mon Jul 14 16:29:56 PDT 2008


Robin King reports:
I did a test run with the same time and process (P580PH3)  as Thermcopoly 1 and the dep rate was only about 55%.  It was also very nonuniform across the wafer.   This tube needs work before charging people to use it. 




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