From jrjain at snf.stanford.edu Thu Jun 12 16:17:29 2008 From: jrjain at snf.stanford.edu (jrjain at snf.stanford.edu) Date: Thu, 12 Jun 2008 16:17:29 -0700 Subject: Problem thermcopoly2 SNF 2008-06-12 16:17:28: B2H6 Flow/MFC Problem Message-ID: B2H6 always reading 23sccm, both with setpoint = 0 and setpoint = 5 in different steps. From maurice at snf.stanford.edu Mon Jun 16 16:09:39 2008 From: maurice at snf.stanford.edu (maurice at snf.stanford.edu) Date: Mon, 16 Jun 2008 16:09:39 -0700 Subject: Problem thermcopoly2 SNF 2008-06-16 16:09:33: B2H6 MFC out for Cal Message-ID: Ok to run everything except B2H6 From maurice at snf.stanford.edu Fri Jun 20 16:08:00 2008 From: maurice at snf.stanford.edu (maurice at snf.stanford.edu) Date: Fri, 20 Jun 2008 16:08:00 -0700 Subject: Problem thermcopoly2 SNF 2008-06-16 16:09:33: B2H6 MFC out for Cal Message-ID: Ray installed calibrated B2H6 mfc. Raja ran the "pflotest" recipe to verify that mfc flowed to setpoint. From maurice at snf.stanford.edu Fri Jun 20 16:08:33 2008 From: maurice at snf.stanford.edu (maurice at snf.stanford.edu) Date: Fri, 20 Jun 2008 16:08:33 -0700 Subject: Problem thermcopoly2 SNF 2008-06-12 16:17:28: B2H6 Flow/MFC Problem Message-ID: B2H6 mfc sent out for cal From tura at snf.stanford.edu Mon Jun 23 15:07:33 2008 From: tura at snf.stanford.edu (tura at snf.stanford.edu) Date: Mon, 23 Jun 2008 15:07:33 -0700 Subject: Problem thermcopoly2 SNF 2008-06-23 15:07:33: PH3 flow 5 instead of 4 Message-ID: PH3 setpoint was 4 but the actual flow was 5 throughout the whole deposition (40min of P620PH3). The tube gave an alarm. From tberg at snf.stanford.edu Thu Jun 26 06:10:01 2008 From: tberg at snf.stanford.edu (tberg at snf.stanford.edu) Date: Thu, 26 Jun 2008 06:10:01 -0700 Subject: Problem thermcopoly2 SNF 2008-06-23 15:07:33: PH3 flow 5 instead of 4 Message-ID: Checked flow it was at 5sccm even though readout may vary slightly