Problem thermcopoly2 SNF 2008-06-23 15:07:33: PH3 flow 5 instead of 4

tura at snf.stanford.edu tura at snf.stanford.edu
Mon Jun 23 15:07:33 PDT 2008


PH3 setpoint was 4 but the actual flow was 5 throughout the whole deposition (40min of P620PH3). The tube gave an alarm.




More information about the thermcopoly2-pcs mailing list