Problem thermcopoly2 SNF 2008-06-23 15:07:33: PH3 flow 5 instead of 4
tura at snf.stanford.edu
tura at snf.stanford.edu
Mon Jun 23 15:07:33 PDT 2008
PH3 setpoint was 4 but the actual flow was 5 throughout the whole deposition (40min of P620PH3). The tube gave an alarm.
More information about the thermcopoly2-pcs
mailing list