From maurice at snf.stanford.edu  Mon Jun  1 11:02:22 2009
From: maurice at snf.stanford.edu (maurice at snf.stanford.edu)
Date: Mon, 1 Jun 2009 11:02:22 -0700
Subject: Problem thermcopoly2 SNF 2009-03-06 16:53:57: B2H6 offline
Message-ID: <mailman.60.1356283592.4893.thermcopoly2-pcs@snf.stanford.edu>

B2H6 back on line



From skoh at snf.stanford.edu  Fri Jun  5 17:40:15 2009
From: skoh at snf.stanford.edu (skoh at snf.stanford.edu)
Date: Fri, 5 Jun 2009 17:40:15 -0700
Subject: Problem thermcopoly2 SNF 2009-06-05 17:40:15: No B2H6 Flow
Message-ID: <mailman.61.1356283592.4893.thermcopoly2-pcs@snf.stanford.edu>

Ran PGEBDOPE recipe - 5sccm of B2H6 wanted, but no B2H6 flow obtained.



From tberg at snf.stanford.edu  Mon Jun  8 06:38:53 2009
From: tberg at snf.stanford.edu (tberg at snf.stanford.edu)
Date: Mon, 8 Jun 2009 06:38:53 -0700
Subject: Problem thermcopoly2 SNF 2009-06-05 17:40:15: No B2H6 Flow
Message-ID: <mailman.62.1356283592.4893.thermcopoly2-pcs@snf.stanford.edu>

Found B2H6 regulator backed out, adjusted



From seymour at snf.stanford.edu  Mon Jun 22 07:12:43 2009
From: seymour at snf.stanford.edu (seymour at snf.stanford.edu)
Date: Mon, 22 Jun 2009 07:12:43 -0700
Subject: Problem thermcopoly2 SNF 2009-06-22 07:12:42: changing Germane cylinder
Message-ID: <mailman.63.1356283592.4893.thermcopoly2-pcs@snf.stanford.edu>




From tberg at snf.stanford.edu  Tue Jun 23 07:50:44 2009
From: tberg at snf.stanford.edu (tberg at snf.stanford.edu)
Date: Tue, 23 Jun 2009 07:50:44 -0700
Subject: Problem thermcopoly2 SNF 2009-06-22 07:12:42: changing Germane cylinder
Message-ID: <mailman.64.1356283592.4893.thermcopoly2-pcs@snf.stanford.edu>

GEH4 replaced and leak checked back on line