Problem thermcopoly2 SNF 2009-06-05 17:40:15: No B2H6 Flow

skoh at snf.stanford.edu skoh at snf.stanford.edu
Fri Jun 5 17:40:15 PDT 2009


Ran PGEBDOPE recipe - 5sccm of B2H6 wanted, but no B2H6 flow obtained.




More information about the thermcopoly2-pcs mailing list