Problem thermcopoly2 SNF 2010-01-27 07:40:37: Poly dep rate low

maurice at snf.stanford.edu maurice at snf.stanford.edu
Wed Jan 27 07:40:37 PST 2010


Ran P680poly  00:10:00
expected ~1200Ang
Actual 680ang
temp, gas flow and pressure were good during deposition




More information about the thermcopoly2-pcs mailing list