From tberg at snf.stanford.edu Mon May 3 09:56:44 2010 From: tberg at snf.stanford.edu (tberg at snf.stanford.edu) Date: Mon, 3 May 2010 09:56:44 -0700 Subject: Shutdown thermcopoly2 SNF 2010-05-03 09:56:44: Not pumping Message-ID: From tberg at snf.stanford.edu Mon May 3 11:56:25 2010 From: tberg at snf.stanford.edu (tberg at snf.stanford.edu) Date: Mon, 3 May 2010 11:56:25 -0700 Subject: Shutdown thermcopoly2 SNF 2010-05-03 09:56:44: Not pumping Message-ID: Added oil to pump and blower and reset blower. ran stbypoly no problem From thulasi at snf.stanford.edu Sun May 9 14:35:13 2010 From: thulasi at snf.stanford.edu (thulasi at snf.stanford.edu) Date: Sun, 9 May 2010 14:35:13 -0700 Subject: Problem thermcopoly2 SNF 2010-05-09 14:35:12: Particles on the sample Holder Message-ID: There is some particles on the sample holder From maurice at snf.stanford.edu Wed May 12 15:47:28 2010 From: maurice at snf.stanford.edu (maurice at snf.stanford.edu) Date: Wed, 12 May 2010 15:47:28 -0700 Subject: Comment thermcopoly2 SNF 2010-05-12 15:47:28: created p525ph3, p525b2h6 Message-ID: Created doped poly recipes at 525c From maurice at snf.stanford.edu Fri May 14 11:24:54 2010 From: maurice at snf.stanford.edu (maurice at snf.stanford.edu) Date: Fri, 14 May 2010 11:24:54 -0700 Subject: Comment thermcopoly2 SNF 2010-05-14 11:24:53: Message-ID: P525POLY, P525PH3 and P525B2H6 all have a silane flow of 150sccm and pressure of 200mt. - (P525POLY had 135 sccm silane and 400mt for pressure) -m From maurice at snf.stanford.edu Fri May 14 15:54:21 2010 From: maurice at snf.stanford.edu (maurice at snf.stanford.edu) Date: Fri, 14 May 2010 15:54:21 -0700 Subject: Comment thermcopoly2 SNF 2010-05-14 15:54:21: created variable poly recipes Message-ID: created PVARPOLY, PVARPH3 and PVARB2H6 with variable silane, pressure, dopant,time