Comment thermcopoly2 SNF 2010-05-14 11:24:53:

maurice at snf.stanford.edu maurice at snf.stanford.edu
Fri May 14 11:24:54 PDT 2010


  P525POLY, P525PH3 and P525B2H6 all have a silane flow of 150sccm and pressure of 200mt.
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(P525POLY had 135 sccm silane and 400mt for pressure)
-m




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