From dongrip at snf.stanford.edu  Sat Nov 13 12:54:27 2010
From: dongrip at snf.stanford.edu (dongrip at snf.stanford.edu)
Date: Sat, 13 Nov 2010 12:54:27 -0800
Subject: Problem thermcopoly2 SNF 2010-11-13 12:54:26: leak fail
Message-ID: <mailman.155.1356283592.4893.thermcopoly2-pcs@snf.stanford.edu>

During base pressure check, the furnace can't go below 150 mTorr, so leak fails in the leak check step. I ran polyout recipe and did another try, but the furnace keeps failing the leak check.
I left the furnace in standby mode.



From tberg at snf.stanford.edu  Mon Nov 15 09:22:42 2010
From: tberg at snf.stanford.edu (tberg at snf.stanford.edu)
Date: Mon, 15 Nov 2010 09:22:42 -0800
Subject: Problem thermcopoly2 SNF 2010-11-13 12:54:26: leak fail
Message-ID: <mailman.156.1356283593.4893.thermcopoly2-pcs@snf.stanford.edu>

added oil to pump and blower pressure and leak rate are good