Problem thermcopoly2 SNF 2010-11-13 12:54:26: leak fail

dongrip at snf.stanford.edu dongrip at snf.stanford.edu
Sat Nov 13 12:54:27 PST 2010


During base pressure check, the furnace can't go below 150 mTorr, so leak fails in the leak check step. I ran polyout recipe and did another try, but the furnace keeps failing the leak check.
I left the furnace in standby mode.




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