From maurice at snf.stanford.edu Mon Oct 4 10:22:13 2010 From: maurice at snf.stanford.edu (maurice at snf.stanford.edu) Date: Mon, 4 Oct 2010 10:22:13 -0700 Subject: Comment thermcopoly2 SNF 2010-10-04 10:22:12: PBAKE recipe written Message-ID: PBAKE variable time and temp lo N2 lo pressure From maurice at snf.stanford.edu Wed Oct 13 16:27:35 2010 From: maurice at snf.stanford.edu (maurice at snf.stanford.edu) Date: Wed, 13 Oct 2010 16:27:35 -0700 Subject: Comment thermcopoly2 SNF 2010-10-13 16:27:35: created recipe PGE2 Message-ID: same as PGE but start temp is 400c (user has Al on wafer) The subroutine INITCON3 was replaced with INI3COLD