From maurice at snf.stanford.edu  Thu Sep 23 09:50:12 2010
From: maurice at snf.stanford.edu (maurice at snf.stanford.edu)
Date: Thu, 23 Sep 2010 09:50:12 -0700
Subject: Shutdown thermcopoly2 SNF 2010-09-23 09:50:12: SiH4 flow lo
Message-ID: <mailman.151.1356283592.4893.thermcopoly2-pcs@snf.stanford.edu>

P620Poly recipe has a SiH4 set point of 150sccm.
It is flowing only 13



From seymour at snf.stanford.edu  Fri Sep 24 07:56:33 2010
From: seymour at snf.stanford.edu (seymour at snf.stanford.edu)
Date: Fri, 24 Sep 2010 07:56:33 -0700
Subject: Shutdown thermcopoly2 SNF 2010-09-23 09:50:12: SiH4 flow lo
Message-ID: <mailman.152.1356283592.4893.thermcopoly2-pcs@snf.stanford.edu>

silane pressure back to normal value