From tberg at snf.stanford.edu Tue May 10 06:28:07 2011 From: tberg at snf.stanford.edu (tberg at snf.stanford.edu) Date: Tue, 10 May 2011 06:28:07 -0700 Subject: Problem thermcopoly2 SNF 2011-05-10 06:28:07: GeH4 Cylinder Change Message-ID: From seymour at snf.stanford.edu Tue May 10 07:43:10 2011 From: seymour at snf.stanford.edu (seymour at snf.stanford.edu) Date: Tue, 10 May 2011 07:43:10 -0700 Subject: Comment thermcopoly2 SNF 2011-05-10 07:43:09: germane cylinder changed Message-ID: on leak check at this time From tberg at snf.stanford.edu Tue May 10 13:57:23 2011 From: tberg at snf.stanford.edu (tberg at snf.stanford.edu) Date: Tue, 10 May 2011 13:57:23 -0700 Subject: Problem thermcopoly2 SNF 2011-05-10 06:28:07: GeH4 Cylinder Change Message-ID: Cylinder changed, Leak checked From tberg at snf.stanford.edu Tue May 10 13:57:30 2011 From: tberg at snf.stanford.edu (tberg at snf.stanford.edu) Date: Tue, 10 May 2011 13:57:30 -0700 Subject: Comment thermcopoly2 SNF 2011-05-10 07:43:09: germane cylinder changed Message-ID: Cylinder changed, Leak checked From khoang at snf.stanford.edu Thu May 19 20:09:34 2011 From: khoang at snf.stanford.edu (khoang at snf.stanford.edu) Date: Thu, 19 May 2011 20:09:34 -0700 Subject: Problem thermcopoly2 SNF 2011-05-19 20:09:33: 4-inch wafer boats broken Message-ID: Recipe: PVARPOLY (set TEMP = 800C, Pressure = 200mTorr, SiH4 = 0 and time = 60 minutes) The max temperature was ~740C during the first 25 minutes of the run. "GAS SW3 err" appeared and the temperature dropped to ~500C. After the tube vented and opened, two 4-inch wafer boats were found broken. The broken wafer boats were collected in a bag. Load and run STBYPOLY, and the tube is in the process hold steo. From tberg at snf.stanford.edu Fri May 20 06:56:30 2011 From: tberg at snf.stanford.edu (tberg at snf.stanford.edu) Date: Fri, 20 May 2011 06:56:30 -0700 Subject: Problem thermcopoly2 SNF 2011-05-19 20:09:33: 4-inch wafer boats broken Message-ID: replaced 2 4"boats back in stbypoly. reset temp controller-controlling fine From tberg at snf.stanford.edu Fri May 20 06:56:46 2011 From: tberg at snf.stanford.edu (tberg at snf.stanford.edu) Date: Fri, 20 May 2011 06:56:46 -0700 Subject: Problem thermcopoly2 SNF 2011-05-20 06:56:46: observing temp Message-ID: From maurice at snf.stanford.edu Fri May 20 14:10:33 2011 From: maurice at snf.stanford.edu (maurice at snf.stanford.edu) Date: Fri, 20 May 2011 14:10:33 -0700 Subject: Comment thermcopoly2 SNF 2011-05-20 14:10:33: Initcon3 over temp increased to 850 Message-ID: Initcon3 over temp increased to 850 to allow 800c anneal From maurice at snf.stanford.edu Fri May 20 14:11:22 2011 From: maurice at snf.stanford.edu (maurice at snf.stanford.edu) Date: Fri, 20 May 2011 14:11:22 -0700 Subject: Problem thermcopoly2 SNF 2011-05-20 06:56:46: observing temp Message-ID: Initcon3 over temp increased to 850 to allow 800c anneal From maurice at snf.stanford.edu Fri May 20 14:35:36 2011 From: maurice at snf.stanford.edu (maurice at snf.stanford.edu) Date: Fri, 20 May 2011 14:35:36 -0700 Subject: Comment thermcopoly2 SNF 2011-05-20 14:35:35: new dummies added Message-ID: