From maurice at snf.stanford.edu Fri Oct 14 13:21:17 2011 From: maurice at snf.stanford.edu (maurice at snf.stanford.edu) Date: Fri, 14 Oct 2011 13:21:17 -0700 Subject: Comment thermcopoly2 SNF 2011-10-14 13:21:17: reated "PVARSBP" Message-ID: I have created "PVARSBP" and it has the following variables in one deposition step: SiH4 flow (S) B2H6 flow (B) PH3 flow (P) process pressure temperature dep time From chienyuc at snf.stanford.edu Tue Oct 18 14:46:40 2011 From: chienyuc at snf.stanford.edu (chienyuc at snf.stanford.edu) Date: Tue, 18 Oct 2011 14:46:40 -0700 Subject: Problem thermcopoly2 SNF 2011-10-18 14:46:39: HSP fail at 800C Message-ID: Ran recipe PVARSBP at 800C and got HSP fail. It seems that the o-ring failed at such high temperature and could not pump down again. Also failed to run STBYPOLY and left vented. From chienyuc at snf.stanford.edu Tue Oct 18 15:13:11 2011 From: chienyuc at snf.stanford.edu (chienyuc at snf.stanford.edu) Date: Tue, 18 Oct 2011 15:13:11 -0700 Subject: Comment thermcopoly2 SNF 2011-10-18 15:13:10: Particles in the tube Message-ID: Supplyment to previous pumping failure problem: notice a large amount of particle/dust or broken pieces in the tube. Some of them attached on the door o-ring after tube pullout. That may be one of the cause for leakage and may need a tube pull and clean. Not sure if it relates to the fact of heating up to 800C, but no dummy/real wafer broken in my run. From tberg at snf.stanford.edu Wed Oct 19 06:20:41 2011 From: tberg at snf.stanford.edu (tberg at snf.stanford.edu) Date: Wed, 19 Oct 2011 06:20:41 -0700 Subject: Shutdown thermcopoly2 SNF 2011-10-19 06:20:40: Tube is destroyed Message-ID: From seymour at snf.stanford.edu Thu Oct 20 14:49:18 2011 From: seymour at snf.stanford.edu (seymour at snf.stanford.edu) Date: Thu, 20 Oct 2011 14:49:18 -0700 Subject: Comment thermcopoly2 SNF 2011-10-20 14:49:17: tube installed Message-ID: good base and ror. element breaker is on. running poly standby needs coat and test. From tberg at snf.stanford.edu Fri Oct 21 09:39:01 2011 From: tberg at snf.stanford.edu (tberg at snf.stanford.edu) Date: Fri, 21 Oct 2011 09:39:01 -0700 Subject: Problem thermcopoly2 SNF 2011-10-18 14:46:39: HSP fail at 800C Message-ID: Tube blown up. Cleaned up a ton of broken quartz. Replaced tube, boats, TC sheath. Do Not run above 700C From tberg at snf.stanford.edu Fri Oct 21 09:39:41 2011 From: tberg at snf.stanford.edu (tberg at snf.stanford.edu) Date: Fri, 21 Oct 2011 09:39:41 -0700 Subject: Comment thermcopoly2 SNF 2011-10-18 15:13:10: Particles in the tube Message-ID: Tube blown up. Cleaned up a ton of broken quartz. Replaced tube, boats, TC sheath. Do Not run above 700C From tberg at snf.stanford.edu Fri Oct 21 09:39:52 2011 From: tberg at snf.stanford.edu (tberg at snf.stanford.edu) Date: Fri, 21 Oct 2011 09:39:52 -0700 Subject: Shutdown thermcopoly2 SNF 2011-10-19 06:20:40: Tube is destroyed Message-ID: Tube blown up. Cleaned up a ton of broken quartz. Replaced tube, boats, TC sheath. Do Not run above 700C From tberg at snf.stanford.edu Fri Oct 21 09:41:30 2011 From: tberg at snf.stanford.edu (tberg at snf.stanford.edu) Date: Fri, 21 Oct 2011 09:41:30 -0700 Subject: Problem thermcopoly2 SNF 2011-10-21 09:41:29: Coat completed needs test Message-ID: Coat completed needs test. Putting it to yellow if users want to test. Do not run above 700C From mtang at snf.stanford.edu Fri Oct 21 21:56:28 2011 From: mtang at snf.stanford.edu (mtang at snf.stanford.edu) Date: Fri, 21 Oct 2011 21:56:28 -0700 Subject: Problem thermcopoly2 SNF 2011-10-21 21:56:28: No GeH4 Message-ID: Toxic monitoring sensor for this cabinet failed, so we cannot run this gas. From tberg at snf.stanford.edu Tue Oct 25 06:27:23 2011 From: tberg at snf.stanford.edu (tberg at snf.stanford.edu) Date: Tue, 25 Oct 2011 06:27:23 -0700 Subject: Shutdown thermcopoly2 SNF 2011-10-25 06:27:22: water work Message-ID: From tberg at snf.stanford.edu Tue Oct 25 11:15:21 2011 From: tberg at snf.stanford.edu (tberg at snf.stanford.edu) Date: Tue, 25 Oct 2011 11:15:21 -0700 Subject: Shutdown thermcopoly2 SNF 2011-10-25 06:27:22: water work Message-ID: water work done From tberg at snf.stanford.edu Wed Oct 26 14:04:23 2011 From: tberg at snf.stanford.edu (tberg at snf.stanford.edu) Date: Wed, 26 Oct 2011 14:04:23 -0700 Subject: Problem thermcopoly2 SNF 2011-10-21 21:56:28: No GeH4 Message-ID: Repaired GeH4 sensor. No indication for 3 hours-bacK on line. From tberg at snf.stanford.edu Fri Oct 28 08:24:56 2011 From: tberg at snf.stanford.edu (tberg at snf.stanford.edu) Date: Fri, 28 Oct 2011 08:24:56 -0700 Subject: Problem thermcopoly2 SNF 2011-10-21 09:41:29: Coat completed needs test Message-ID: several users have run the system