From maurice at stanford.edu Wed Aug 18 10:19:27 2010 From: maurice at stanford.edu (maurice stevens) Date: Wed, 18 Aug 2010 10:19:27 -0700 Subject: Phospine source for thermcopoly1 In-Reply-To: References: Message-ID: <4C6C161F.8030000@stanford.edu> As of yesterday the phosphine bottle was in Sacramento. We are hoping to get it today. Once we get the bottle we will install it and do a 24 hour leak check. We will send an email once the bottle is online. -m Scott Lee wrote: > Hi Maurice, > > Do you know if the phospine source for thermcopoly1 has been > replaced? Coral says a new bottle should have come in on 7/29 but > there is no update as to whether or not it was replaced. > > Thanks, > Scott -- maurice at stanford.edu Maurice Stevens Stanford Nanofabrication Facility CIS Room 142, Mail Code 4070 Stanford, CA 94305 P. (650)725-3660 F. (650)725.6278 From maurice at stanford.edu Tue Aug 24 09:22:16 2010 From: maurice at stanford.edu (maurice stevens) Date: Tue, 24 Aug 2010 09:22:16 -0700 Subject: PH3 is back on Thermcopoly1/2 Message-ID: <4C73F1B8.9090401@stanford.edu> Ray put the following on Coral: -------- Original Message -------- Subject: Re: Problem thermcopoly2 SNF 2010-07-22 12:15:48: 15% Phosphine/Silane cylinder very near empty. Date: Tue, 24 Aug 2010 07:11:51 -0700 From: seymour at snf.stanford.edu To: thermcopoly2-pcs at snf.stanford.edu cylinder has been installed and passed leak check. line charged with phosphine/silane -- maurice at stanford.edu Maurice Stevens Stanford Nanofabrication Facility CIS Room 142, Mail Code 4070 Stanford, CA 94305 P. (650)725-3660 F. (650)725.6278 From mmessana at stanford.edu Tue Aug 24 15:11:04 2010 From: mmessana at stanford.edu (Matthew W. Messana) Date: Tue, 24 Aug 2010 15:11:04 -0700 Subject: thermcopoly2 use tonight Message-ID: <006d01cb43d9$3e9afce0$bbd0f6a0$@edu> My process should finish by 10:00pm but I'd prefer to just let it pump and take the wafers out tomorrow morning. If anyone needs the tool, I'm happy to come take my wafers out tonight. Please let me know. Matt -------------- next part -------------- An HTML attachment was scrubbed... URL: