PH3 is back on Thermcopoly1/2

[maurice stevens]

Ray put the following on Coral:

-------- Original Message --------
Subject: 	Re: Problem thermcopoly2 SNF 2010-07-22 12:15:48: 15% 
Phosphine/Silane cylinder very near empty.
Date: 	Tue, 24 Aug 2010 07:11:51 -0700
From: 	seymour at snf.stanford.edu
To: 	thermcopoly2-pcs at snf.stanford.edu



cylinder has been installed and passed leak check. line charged with phosphine/silane



-- 
maurice at stanford.edu

Maurice Stevens
Stanford Nanofabrication Facility
CIS Room 142, Mail Code 4070
Stanford, CA  94305
P. (650)725-3660
F. (650)725.6278