PH3 is back on Thermcopoly1/2

maurice stevens maurice at
Tue Aug 24 09:22:16 PDT 2010

Ray put the following on Coral:

-------- Original Message --------
Subject: 	Re: Problem thermcopoly2 SNF 2010-07-22 12:15:48: 15% 
Phosphine/Silane cylinder very near empty.
Date: 	Tue, 24 Aug 2010 07:11:51 -0700
From: 	seymour at
To: 	thermcopoly2-pcs at

cylinder has been installed and passed leak check. line charged with phosphine/silane

maurice at

Maurice Stevens
Stanford Nanofabrication Facility
CIS Room 142, Mail Code 4070
Stanford, CA  94305
P. (650)725-3660
F. (650)725.6278

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