ThermcoPoly1 going gold
edmyers at stanford.edu
Tue Mar 9 10:34:02 PST 2010
I want to remind everyone that ThermcoPoly1 will transition over to
gold contaminated on Monday, March 15th.
Since Maurice is out of the office, please let Nancy or Ed know if
you have any concerns.
At 12:19 PM 3/3/2010, maurice stevens wrote:
>ThermcoPoly1 is tentatively scheduled to become a gold contaminated
>furnace March 15th.
>All clean doped poly with move over to Thermcopoly2. The tubes
>operate exactly the same (except that ThermcoPoly2 has not had any
>boat calibration issues). All the standard recipes are on both.
>We expect to have the doping/growth rate charts finished by that time.
>You are free to start using ThermcoPoly2 now and I have already
>added many of you to the ThermcoPoly2 qualification list. If you
>didn't get a qualification let me ( or Ed/Nancy/Mary) know and we will add you.
>Why is ThermcoPoly2 the clean tube? Both ThermcoPoly tubes can
>deposited doped films but only ThermcoPoly2 is plumbed with Ge. It
>is our only "clean" doped Ge tube so it could not become the "gold" tube.
>If you have comments or concerns or compliments, let me know.
>maurice at stanford.edu
>Stanford Nanofabrication Facility
>CIS Room 142, Mail Code 4070
>Stanford, CA 94305
More information about the thermcopoly2