From rcrane at snf.stanford.edu  Fri Aug  2 10:41:01 2002
From: rcrane at snf.stanford.edu (Dick Crane)
Date: Fri, 02 Aug 2002 10:41:01 -0700
Subject: [Fwd: Equipment Status]
Message-ID: <3D4AC42D.289F9858@snf.stanford.edu>



Jim Haydon wrote:

> Balzers:
> Gryphon:
> Implanter:  Waiting for valve manifold for end station Implanter still
> operational
> Innotec:
> Metalica:
> STS Dep:
> wbgen- CTB:
> wbgen-LHP:
> wbgen-RHP:
> wbMETAL:
> wbNITRIDE:
> wbNONMETAL:
> wbDIFF:
> wbSILICIDE:
> wbGAASCL:    Waiting for stirrer control board
> wbMISCRES:
> wbOPTRES:
> DI WATER:
> NITROGEN:  High usage pressure loss problem trying to locate cause



From jhaydon at snf.stanford.edu  Mon Aug  5 08:19:58 2002
From: jhaydon at snf.stanford.edu (Jim Haydon)
Date: Mon, 05 Aug 2002 08:19:58 -0700
Subject: Equipment Status
Message-ID: <3D4E979E.F6EBDEB7@snf.stanford.edu>




Balzers:
Gryphon:
Implanter: Waiting for valve manifold for endstation. Implanter is still
operational.
Innotec:
Metalica:
STS Dep:
wbgen- CTB:
wbgen-LHP:
wbgen-RHP:
wbMETAL:
wbNITRIDE:
wbNONMETAL:
wbDIFF:
wbSILICIDE:
wbGAASCL:  Waiting for controller board for stirrer should be hear
around 8/16/02
wbMISCRES:
wbOPTRES:
DI WATER:
NITROGEN:




From jhaydon at snf.stanford.edu  Tue Aug  6 08:24:01 2002
From: jhaydon at snf.stanford.edu (Jim Haydon)
Date: Tue, 06 Aug 2002 08:24:01 -0700
Subject: Equipment Status
Message-ID: <3D4FEA10.2170D55A@snf.stanford.edu>




Balzers:
Gryphon:
Implanter: Wating for valve manifold for end station. Implanter is still
operational
Innotec:
Metalica:
STS Dep:
wbgen- CTB:     Shut down for exhaust fan repair until 11:00
wbgen-LHP:    Shut down for exhaust fan repair until 11:00
wbgen-RHP:    Shut down for exhaust fan repair until 11:00
wbMETAL:    Shut down for exhaust fan repair until 11:00
wbNITRIDE:    Shut down for exhaust fan repair until 11:00
wbNONMETAL:    Shut down for exhaust fan repair until 11:00
wbDIFF:    Shut down for exhaust fan repair until 11:00
wbSILICIDE:    Shut down for exhaust fan repair until 11:00
wbGAASCL:    Shut down for exhaust fan repair until 11:00. Waiting for
controller board for stirrer
wbMISCRES:       Shut down for exhaust fan repair until 11:00
wbOPTRES:    Shut down for exhaust fan repair until 11:00
DI WATER:
NITROGEN:




From jhaydon at snf.stanford.edu  Tue Aug  6 11:19:22 2002
From: jhaydon at snf.stanford.edu (Jim Haydon)
Date: Tue, 06 Aug 2002 11:19:22 -0700
Subject: Equipment Status
Message-ID: <3D501329.51B196C6@snf.stanford.edu>




Balzers:
Gryphon:
Implanter:    Waiting for valve manifold for end station. Implanter is
still operational
Innotec:
Metalica:
STS Dep:
wbgen- CTB:     Shut down for exhaust fan bearing replacement until 1:00

wbgen-LHP:    Shut down for exhaust fan bearing replacement until 1:00
wbgen-RHP:    Shut down for exhaust fan bearing replacement until 1:00
wbMETAL:    Shut down for exhaust fan bearing replacement until 1:00
wbNITRIDE:    Shut down for exhaust fan bearing replacement until 1:00
wbNONMETAL:    Shut down for exhaust fan bearing replacement until 1:00
wbDIFF:    Shut down for exhaust fan bearing replacement until 1:00
wbSILICIDE:    Shut down for exhaust fan bearing replacement until 1:00
wbGAASCL:    Shut down for exhaust fan bearing replacement until 1:00
wbMISCRES:    Shut down for exhaust fan bearing replacement until 1:00
wbOPTRES:    Shut down for exhaust fan bearing replacement until 1:00
DI WATER:
NITROGEN:




From jhaydon at snf.stanford.edu  Wed Aug  7 08:25:16 2002
From: jhaydon at snf.stanford.edu (Jim Haydon)
Date: Wed, 07 Aug 2002 08:25:16 -0700
Subject: Equipment Status
Message-ID: <3D513BDC.841B9507@snf.stanford.edu>




Balzers:
Gryphon:
Implanter:    Waiting for valve manifold for end station. Implanter is
still operational
Innotec:
Metalica:
STS Dep:     Possible leak in the SiH4 input valve STS is still
operational
wbgen- CTB:
wbgen-LHP:
wbgen-RHP:
wbMETAL:
wbNITRIDE:
wbNONMETAL:
wbDIFF:
wbSILICIDE:
wbGAASCL:    Wating for controller board for stirrer should be here
around 8/16/02. Hot plate still operational
wbMISCRES:
wbOPTRES:
DI WATER:
NITROGEN:




From jhaydon at snf.stanford.edu  Fri Aug  9 09:04:00 2002
From: jhaydon at snf.stanford.edu (Jim Haydon)
Date: Fri, 09 Aug 2002 09:04:00 -0700
Subject: Equipment Status
Message-ID: <3D53E7F0.3675B7FD@snf.stanford.edu>




Balzers:
Gryphon:
Implanter:    Waiting for valve manifold for end station. Implanter is
still operational
Innotec:
Metalica:
STS Dep:    Possible flow control problem with silane nitrogen
wbgen- CTB:
wbgen-LHP:
wbgen-RHP:
wbMETAL:
wbNITRIDE:
wbNONMETAL:     Possible non functioning timer
wbDIFF:
wbSILICIDE:
wbGAASCL:    Stirrer not working should have new controller installed by
8/12/02
wbMISCRES:
wbOPTRES:
DI WATER:
NITROGEN:




From jhaydon at snf.stanford.edu  Mon Aug 12 08:47:54 2002
From: jhaydon at snf.stanford.edu (Jim Haydon)
Date: Mon, 12 Aug 2002 08:47:54 -0700
Subject: Equipment Status
Message-ID: <3D57D8AA.B738FEFB@snf.stanford.edu>




Balzers:
Gryphon:
Implanter:    Waiting for valve manifold for end station. Implanter is
still operational
Innotec:
Metalica:
STS Dep:    Possible flow control problem on silane purge cycle
wbgen- CTB:
wbgen-LHP:
wbgen-RHP:
wbMETAL:
wbNITRIDE:
wbNONMETAL:
wbDIFF:
wbSILICIDE:
wbGAASCL:    Stirrer speed control problem speed sensor probably an open
or flaky sensor
wbMISCRES:
wbOPTRES:
DI WATER:
NITROGEN:




From jhaydon at snf.stanford.edu  Tue Aug 13 09:17:01 2002
From: jhaydon at snf.stanford.edu (Jim Haydon)
Date: Tue, 13 Aug 2002 09:17:01 -0700
Subject: Equipment Status
Message-ID: <3D5930FD.276E79CC@snf.stanford.edu>




Balzers:
Gryphon:
Implanter: Waiting for valve manifold for end station. Implanter is
still operational
Innotec:
Metalica:
STS Dep:
wbgen- CTB:
wbgen-LHP:
wbgen-RHP:
wbMETAL:
wbNITRIDE:
wbNONMETAL:
wbDIFF:
wbSILICIDE:
wbGAASCL: Right hand hotplate stirrer not working probably an open or
flaky sensor. Should have it fixed by today
wbMISCRES:
wbOPTRES:
DI WATER:
NITROGEN:




From jhaydon at snf.stanford.edu  Wed Aug 14 08:15:13 2002
From: jhaydon at snf.stanford.edu (Jim Haydon)
Date: Wed, 14 Aug 2002 08:15:13 -0700
Subject: Equipment Status
Message-ID: <3D5A7401.A27730F6@snf.stanford.edu>




Balzers:
Gryphon:
Implanter:    Valve manifold for end station has been shipped should be
here by the end of the week. Implanter is still operational
Innotec:
Metalica:
STS Dep:
wbgen- CTB:
wbgen-LHP:
wbgen-RHP:
wbMETAL:
wbNITRIDE:
wbNONMETAL:
wbDIFF:
wbSILICIDE:
wbGAASCL:
wbMISCRES:
wbOPTRES:
DI WATER:
NITROGEN:




From jhaydon at snf.stanford.edu  Fri Aug 16 08:46:40 2002
From: jhaydon at snf.stanford.edu (Jim Haydon)
Date: Fri, 16 Aug 2002 08:46:40 -0700
Subject: Equipment Status
Message-ID: <3D5D1E60.EDA6A99B@snf.stanford.edu>




Balzers:
Gryphon:
Implanter:     Valve manifold for end station has been shipped should
arrive by the end of the week. Implanter is still operational
Innotec:
Metalica:
STS Dep:
wbgen- CTB:
wbgen-LHP:
wbgen-RHP:
wbMETAL:
wbNITRIDE:
wbNONMETAL:
wbDIFF:
wbSILICIDE:
wbGAASCL:
wbMISCRES:
wbOPTRES:
DI WATER:
NITROGEN:




From jhaydon at snf.stanford.edu  Mon Aug 19 08:43:14 2002
From: jhaydon at snf.stanford.edu (Jim Haydon)
Date: Mon, 19 Aug 2002 08:43:14 -0700
Subject: Equipment Status
Message-ID: <3D611212.35B6FDCF@snf.stanford.edu>




Balzers:
Gryphon: Power supply failure Gryphon is off line. Will up date later
today as to when it might be fixed.
Implanter:  Valve manifold for end station has been shipped should be
here this week. Implanter is still operational
Innotec:
Metalica:
STS Dep:
wbgen- CTB:
wbgen-LHP:
wbgen-RHP:
wbMETAL:
wbNITRIDE:
wbNONMETAL:
wbDIFF:
wbSILICIDE:
wbGAASCL:
wbMISCRES:
wbOPTRES:
DI WATER:
NITROGEN:




From jhaydon at snf.stanford.edu  Mon Aug 19 16:42:03 2002
From: jhaydon at snf.stanford.edu (Jim Haydon)
Date: Mon, 19 Aug 2002 16:42:03 -0700
Subject: Equipment Status
Message-ID: <3D61824B.3F78B567@snf.stanford.edu>




Balzers:
Gryphon:  Bad power supply: the Gryphon will probably be down at least
until 8/21/02
Implanter:
Innotec:
Metalica:
STS Dep:
wbgen- CTB:
wbgen-LHP:
wbgen-RHP:
wbMETAL:
wbNITRIDE:
wbNONMETAL:
wbDIFF:
wbSILICIDE:
wbGAASCL:
wbMISCRES:
wbOPTRES:
DI WATER:
NITROGEN:




From jhaydon at snf.stanford.edu  Tue Aug 20 09:26:41 2002
From: jhaydon at snf.stanford.edu (Jim Haydon)
Date: Tue, 20 Aug 2002 09:26:41 -0700
Subject: Equipment Status
Message-ID: <3D626DC1.37C9BBE8@snf.stanford.edu>




Balzers:
Gryphon: Bad power supply. Gryphon will be down until at least 8/21/02
Implanter:    Valve manifold has been shipped and should arrive later
this week. The Implanter is still operational
Innotec:
Metalica:
STS Dep:      There is a purge fault but the STS is still ok to use. I
will try to look into it this week
wbgen- CTB:
wbgen-LHP:
wbgen-RHP:
wbMETAL:
wbNITRIDE:
wbNONMETAL:
wbDIFF:
wbSILICIDE:
wbGAASCL:
wbMISCRES:
wbOPTRES:
DI WATER:
NITROGEN:




From jhaydon at snf.stanford.edu  Thu Aug 22 08:46:18 2002
From: jhaydon at snf.stanford.edu (Jim Haydon)
Date: Thu, 22 Aug 2002 08:46:18 -0700
Subject: Equipment Status
Message-ID: <3D65074A.44665918@snf.stanford.edu>




Balzers:
Gryphon:     Power supply has been replaced ok to use
Implanter:    Valve manifold for end station has arrived and should be
installed today
Innotec:
Metalica:
STS Dep:
wbgen- CTB:
wbgen-LHP:
wbgen-RHP:
wbMETAL:
wbNITRIDE:
wbNONMETAL:
wbDIFF:
wbSILICIDE:
wbGAASCL:
wbMISCRES:
wbOPTRES:
DI WATER:
NITROGEN:




From jhaydon at snf.stanford.edu  Fri Aug 23 10:15:07 2002
From: jhaydon at snf.stanford.edu (Jim Haydon)
Date: Fri, 23 Aug 2002 10:15:07 -0700
Subject: Equipment Status
Message-ID: <3D666D9B.64090608@snf.stanford.edu>




Balzers:
Gryphon:
Implanter:  Manifold for end station valves has been installed. Ok to
use
Innotec:
Metalica:
STS Dep:
wbgen- CTB:
wbgen-LHP:
wbgen-RHP:
wbMETAL:
wbNITRIDE:
wbNONMETAL:
wbDIFF:
wbSILICIDE:
wbGAASCL:
wbMISCRES:
wbOPTRES:
DI WATER:
NITROGEN:




From jhaydon at snf.stanford.edu  Mon Aug 26 08:03:15 2002
From: jhaydon at snf.stanford.edu (Jim Haydon)
Date: Mon, 26 Aug 2002 08:03:15 -0700
Subject: Equipment Status
Message-ID: <3D6A4332.DFD78EA3@snf.stanford.edu>




Balzers:      Blazers will be down most of 8/29/02 for water system
changes
Gryphon:
Implanter:
Innotec:    Innotec will be shut down for cryopump replacement, it will
also be down for a few hours on 8/29/02 for some work on the balzers
water system
Metalica:   Down for regen should be completed by late afternoon
STS Dep:
wbgen- CTB:
wbgen-LHP:
wbgen-RHP:
wbMETAL:
wbNITRIDE:
wbNONMETAL:
wbDIFF:
wbSILICIDE:
wbGAASCL:
wbMISCRES:
wbOPTRES:
DI WATER:
NITROGEN:




From jhaydon at snf.stanford.edu  Mon Aug 26 08:15:28 2002
From: jhaydon at snf.stanford.edu (Jim Haydon)
Date: Mon, 26 Aug 2002 08:15:28 -0700
Subject: Equipment Status
Message-ID: <3D6A4610.70FFB90B@snf.stanford.edu>




Balzers:     Balzers wil be shut down for water system work on 8/29/02
Gryphon:
Implanter:
Innotec:     Innotec will be shut down on 8/28/02 for cryopump
replacement. It will also be down far a few hours on 8/29/02 for work on
the water system for Balzers.
Metalica:    Down for regen should be done by late this afternoon
STS Dep:
wbgen- CTB:
wbgen-LHP:
wbgen-RHP:
wbMETAL:
wbNITRIDE:
wbNONMETAL:
wbDIFF:
wbSILICIDE:
wbGAASCL:
wbMISCRES:
wbOPTRES:
DI WATER:
NITROGEN:




From jhaydon at snf.stanford.edu  Wed Aug 28 08:58:42 2002
From: jhaydon at snf.stanford.edu (Jim Haydon)
Date: Wed, 28 Aug 2002 08:58:42 -0700
Subject: Equipment Status
Message-ID: <3D6CF332.7B264E62@snf.stanford.edu>




Balzers:    Blazers will be shut down on 8/29/02 for work on the water
system
Gryphon:
Implanter:
Innotec:    The Innotec will be shut down on 8/29/02 for work on Blazers
water system and cryopump replacement
Metalica:
STS Dep:
wbgen- CTB:
wbgen-LHP:
wbgen-RHP:
wbMETAL:
wbNITRIDE:
wbNONMETAL:
wbDIFF:
wbSILICIDE:
wbGAASCL:
wbMISCRES:
wbOPTRES:
DI WATER:
NITROGEN:




From jhaydon at snf.stanford.edu  Fri Aug 30 10:47:05 2002
From: jhaydon at snf.stanford.edu (Jim Haydon)
Date: Fri, 30 Aug 2002 10:47:05 -0700
Subject: Equipment Status
Message-ID: <3D6FAF99.1E6406CC@snf.stanford.edu>




Balzers:
Gryphon:
Implanter:
Innotec:    The cryopump has been replaced and is cooling down if all
goes well it should be ready later this after noon
Metalica:
STS Dep:
wbgen- CTB:
wbgen-LHP:
wbgen-RHP:
wbMETAL:
wbNITRIDE:
wbNONMETAL:
wbDIFF:
wbSILICIDE:
wbGAASCL:
wbMISCRES:
wbOPTRES:
DI WATER:
NITROGEN: