Balzers: Gryphon: Implanter: Waiting for valve manifold for endstation. Implanter is still operational. Innotec: Metalica: STS Dep: wbgen- CTB: wbgen-LHP: wbgen-RHP: wbMETAL: wbNITRIDE: wbNONMETAL: wbDIFF: wbSILICIDE: wbGAASCL: Waiting for controller board for stirrer should be hear around 8/16/02 wbMISCRES: wbOPTRES: DI WATER: NITROGEN: