Equipment Status
Jim Haydon
jhaydon at snf.stanford.edu
Tue Aug 6 08:24:01 PDT 2002
Balzers:
Gryphon:
Implanter: Wating for valve manifold for end station. Implanter is still
operational
Innotec:
Metalica:
STS Dep:
wbgen- CTB: Shut down for exhaust fan repair until 11:00
wbgen-LHP: Shut down for exhaust fan repair until 11:00
wbgen-RHP: Shut down for exhaust fan repair until 11:00
wbMETAL: Shut down for exhaust fan repair until 11:00
wbNITRIDE: Shut down for exhaust fan repair until 11:00
wbNONMETAL: Shut down for exhaust fan repair until 11:00
wbDIFF: Shut down for exhaust fan repair until 11:00
wbSILICIDE: Shut down for exhaust fan repair until 11:00
wbGAASCL: Shut down for exhaust fan repair until 11:00. Waiting for
controller board for stirrer
wbMISCRES: Shut down for exhaust fan repair until 11:00
wbOPTRES: Shut down for exhaust fan repair until 11:00
DI WATER:
NITROGEN:
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