Equipment Status
Jim Haydon
jhaydon at snf.stanford.edu
Tue Aug 6 11:19:22 PDT 2002
Balzers:
Gryphon:
Implanter: Waiting for valve manifold for end station. Implanter is
still operational
Innotec:
Metalica:
STS Dep:
wbgen- CTB: Shut down for exhaust fan bearing replacement until 1:00
wbgen-LHP: Shut down for exhaust fan bearing replacement until 1:00
wbgen-RHP: Shut down for exhaust fan bearing replacement until 1:00
wbMETAL: Shut down for exhaust fan bearing replacement until 1:00
wbNITRIDE: Shut down for exhaust fan bearing replacement until 1:00
wbNONMETAL: Shut down for exhaust fan bearing replacement until 1:00
wbDIFF: Shut down for exhaust fan bearing replacement until 1:00
wbSILICIDE: Shut down for exhaust fan bearing replacement until 1:00
wbGAASCL: Shut down for exhaust fan bearing replacement until 1:00
wbMISCRES: Shut down for exhaust fan bearing replacement until 1:00
wbOPTRES: Shut down for exhaust fan bearing replacement until 1:00
DI WATER:
NITROGEN:
More information about the thinfilms
mailing list