Equipment Status

[Jim Haydon]

Balzers:
Gryphon:
Implanter:    Waiting for valve manifold for end station. Implanter is
still operational
Innotec:
Metalica:
STS Dep:     Possible leak in the SiH4 input valve STS is still
operational
wbgen- CTB:
wbgen-LHP:
wbgen-RHP:
wbMETAL:
wbNITRIDE:
wbNONMETAL:
wbDIFF:
wbSILICIDE:
wbGAASCL:    Wating for controller board for stirrer should be here
around 8/16/02. Hot plate still operational
wbMISCRES:
wbOPTRES:
DI WATER:
NITROGEN: