Equipment Status

Jim Haydon jhaydon at snf.stanford.edu
Mon Aug 12 08:47:54 PDT 2002




Balzers:
Gryphon:
Implanter:    Waiting for valve manifold for end station. Implanter is
still operational
Innotec:
Metalica:
STS Dep:    Possible flow control problem on silane purge cycle
wbgen- CTB:
wbgen-LHP:
wbgen-RHP:
wbMETAL:
wbNITRIDE:
wbNONMETAL:
wbDIFF:
wbSILICIDE:
wbGAASCL:    Stirrer speed control problem speed sensor probably an open
or flaky sensor
wbMISCRES:
wbOPTRES:
DI WATER:
NITROGEN:





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