Equipment Status

Jim Haydon jhaydon at snf.stanford.edu
Tue Aug 20 09:26:41 PDT 2002




Balzers:
Gryphon: Bad power supply. Gryphon will be down until at least 8/21/02
Implanter:    Valve manifold has been shipped and should arrive later
this week. The Implanter is still operational
Innotec:
Metalica:
STS Dep:      There is a purge fault but the STS is still ok to use. I
will try to look into it this week
wbgen- CTB:
wbgen-LHP:
wbgen-RHP:
wbMETAL:
wbNITRIDE:
wbNONMETAL:
wbDIFF:
wbSILICIDE:
wbGAASCL:
wbMISCRES:
wbOPTRES:
DI WATER:
NITROGEN:





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