Equipment Status

Jim Haydon jhaydon at snf.stanford.edu
Mon Aug 26 08:03:15 PDT 2002




Balzers:      Blazers will be down most of 8/29/02 for water system
changes
Gryphon:
Implanter:
Innotec:    Innotec will be shut down for cryopump replacement, it will
also be down for a few hours on 8/29/02 for some work on the balzers
water system
Metalica:   Down for regen should be completed by late afternoon
STS Dep:
wbgen- CTB:
wbgen-LHP:
wbgen-RHP:
wbMETAL:
wbNITRIDE:
wbNONMETAL:
wbDIFF:
wbSILICIDE:
wbGAASCL:
wbMISCRES:
wbOPTRES:
DI WATER:
NITROGEN:





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