Equipment Status

Jim Haydon jhaydon at snf.stanford.edu
Mon Aug 26 08:15:28 PDT 2002




Balzers:     Balzers wil be shut down for water system work on 8/29/02
Gryphon:
Implanter:
Innotec:     Innotec will be shut down on 8/28/02 for cryopump
replacement. It will also be down far a few hours on 8/29/02 for work on
the water system for Balzers.
Metalica:    Down for regen should be done by late this afternoon
STS Dep:
wbgen- CTB:
wbgen-LHP:
wbgen-RHP:
wbMETAL:
wbNITRIDE:
wbNONMETAL:
wbDIFF:
wbSILICIDE:
wbGAASCL:
wbMISCRES:
wbOPTRES:
DI WATER:
NITROGEN:





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