Equipment Status

Jim Haydon jhaydon at snf.stanford.edu
Wed Aug 28 08:58:42 PDT 2002




Balzers:    Blazers will be shut down on 8/29/02 for work on the water
system
Gryphon:
Implanter:
Innotec:    The Innotec will be shut down on 8/29/02 for work on Blazers
water system and cryopump replacement
Metalica:
STS Dep:
wbgen- CTB:
wbgen-LHP:
wbgen-RHP:
wbMETAL:
wbNITRIDE:
wbNONMETAL:
wbDIFF:
wbSILICIDE:
wbGAASCL:
wbMISCRES:
wbOPTRES:
DI WATER:
NITROGEN:





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