From jhaydon at snf.stanford.edu Fri Dec 6 09:30:33 2002 From: jhaydon at snf.stanford.edu (Jim Haydon) Date: Fri, 06 Dec 2002 09:30:33 -0800 Subject: Thinfilms morning report 11/06/02 Message-ID: <3DF0DEB9.2F9251E2@snf.stanford.edu> Balzers: cryo pump should be installed today Gryphon: may have a flakiness with the ion gauge controller but is ok to use Implanter: ok Innotec: ok Metalica: ok STS Dep: problem with the high frequency RF may take several days to resolve system may partially usable for some processes wbgen- CTB: ok wbgen-LHP: ok wbgen-RHP: ok wbMETAL: ok wbNITRIDE: ok wbNONMETAL: ok wbDIFF: ok wbSILICIDE: ok wbGAASCL: ok wbMISCRES: ok wbOPTRES: ok DI WATER: ok NITROGEN: ok From jhaydon at snf.stanford.edu Mon Dec 2 09:36:55 2002 From: jhaydon at snf.stanford.edu (Jim Haydon) Date: Mon, 02 Dec 2002 09:36:55 -0800 Subject: Thinfilms morning report 12/2/02 Message-ID: <3DEB9A37.BD73E8F2@snf.stanford.edu> Balzers: ok Gryphon: ok Implanter: ok Innotec: ok Metalica: ok STS Dep: ok wbSOLVENT: ok wbgen- CTB: load center problem should be up by noon if I can find the parts wbgen-LHP: load center problem should be up by noon if I can find the parts wbgen-RHP: load center problem should be up by noon if I can find the parts wbMETAL: ok wbNITRIDE: ok wbNONMETAL: ok wbDIFF: ok wbSILICIDE: ok wbGAASCL: ok wbMISCRES: ok wbOPTRES: ok DI WATER: ok NITROGEN: ok From jhaydon at snf.stanford.edu Mon Dec 2 12:59:11 2002 From: jhaydon at snf.stanford.edu (Jim Haydon) Date: Mon, 02 Dec 2002 12:59:11 -0800 Subject: Thinfilms morning report 12/02/02 Message-ID: <3DEBC99F.440F4EEA@snf.stanford.edu> Balzers: ok Gryphon: ok Implanter: ok Innotec: ok Metalica: ok STS Dep: ok wbSOLVENT: ok wbgen- CTB: ok wbgen-LHP: ok wbgen-RHP: ok wbMETAL: ok wbNITRIDE: ok wbNONMETAL: ok wbDIFF: ok wbSILICIDE: ok wbGAASCL: ok wbMISCRES: ok wbOPTRES: ok DI WATER: ok NITROGEN: ok From jhaydon at snf.stanford.edu Tue Dec 3 08:49:10 2002 From: jhaydon at snf.stanford.edu (Jim Haydon) Date: Tue, 03 Dec 2002 08:49:10 -0800 Subject: Thinfilms morning report 10/23/02 Message-ID: <3DECE086.4F2C2804@snf.stanford.edu> Balzers: ok Gryphon: ok Implanter: ok Innotec: ok Metalica: Metalica will need a regen either today or tomorrow morning. STS Dep: ok wbSOLVENT: ok wbgen- CTB: ok wbgen-LHP: ok wbgen-RHP: ok wbMETAL: ok wbNITRIDE: ok wbNONMETAL: ok wbDIFF: ok wbSILICIDE: ok wbGAASCL: ok wbMISCRES: ok wbOPTRES: ok DI WATER: ok NITROGEN: ok From jhaydon at snf.stanford.edu Tue Dec 3 11:15:03 2002 From: jhaydon at snf.stanford.edu (Jim Haydon) Date: Tue, 03 Dec 2002 11:15:03 -0800 Subject: Thinfilms morning report 120/03/02 Message-ID: <3DED02B7.7B6C4573@snf.stanford.edu> Balzers: ok Gryphon: ok Implanter: ok Innotec: ok Metalica: Metalica being regend should be up early evening STS Dep: ok wbSOLVENT: ok wbgen- CTB: ok wbgen-LHP: ok wbgen-RHP: ok wbMETAL: ok wbNITRIDE: ok wbNONMETAL: ok wbDIFF: ok wbSILICIDE: ok wbGAASCL: ok wbMISCRES: ok wbOPTRES: ok DI WATER: ok NITROGEN: ok From jhaydon at snf.stanford.edu Wed Dec 4 08:26:07 2002 From: jhaydon at snf.stanford.edu (Jim Haydon) Date: Wed, 04 Dec 2002 08:26:07 -0800 Subject: Thinfilms morning report 12/04/02 Message-ID: <3DEE2C9F.69B4F598@snf.stanford.edu> Balzers: ok Gryphon: ok Implanter: ok Innotec: ok Metalica: ok STS Dep: ok wbSOLVENT: ok wbgen- CTB: ok wbgen-LHP: ok wbgen-RHP: ok wbMETAL: ok wbNITRIDE: ok wbNONMETAL: ok wbDIFF: ok wbSILICIDE: ok wbGAASCL: ok wbMISCRES: ok wbOPTRES: ok DI WATER: ok NITROGEN: ok From jhaydon at snf.stanford.edu Thu Dec 5 10:03:07 2002 From: jhaydon at snf.stanford.edu (Jim Haydon) Date: Thu, 05 Dec 2002 10:03:07 -0800 Subject: Thinfilms morning report 12/05/02 Message-ID: <3DEF94DB.72338A67@snf.stanford.edu> Balzers: ok Gryphon: ok Implanter: ok Innotec: finishing regen should be done late morning Metalica: ok STS Dep: ok wbSOLVENT: ok wbgen- CTB: ok wbgen-LHP: ok wbgen-RHP: ok wbMETAL: ok wbNITRIDE: ok wbNONMETAL: ok wbDIFF: ok wbSILICIDE: ok wbGAASCL: ok wbMISCRES: ok wbOPTRES: ok DI WATER: ok NITROGEN: ok From jhaydon at snf.stanford.edu Thu Dec 5 11:34:55 2002 From: jhaydon at snf.stanford.edu (Jim Haydon) Date: Thu, 05 Dec 2002 11:34:55 -0800 Subject: Thinfilms morning report 12/05/02 Message-ID: <3DEFAA5F.CAEAB586@snf.stanford.edu> Balzers: ok Gryphon: ok Implanter: ok Innotec: problem with regen won't be up until later this after noon at best Metalica: ok STS Dep: ok wbSOLVENT: ok wbgen- CTB: ok wbgen-LHP: ok wbgen-RHP: ok wbMETAL: ok wbNITRIDE: ok wbNONMETAL: ok wbDIFF: ok wbSILICIDE: ok wbGAASCL: ok wbMISCRES: ok wbOPTRES: ok DI WATER: ok NITROGEN: ok From jhaydon at snf.stanford.edu Fri Dec 6 09:24:22 2002 From: jhaydon at snf.stanford.edu (Jim Haydon) Date: Fri, 06 Dec 2002 09:24:22 -0800 Subject: Thinfilms morning report 12/06/02 Message-ID: <3DF0DD46.687C9A48@snf.stanford.edu> Balzers: ok Gryphon: ok Implanter: ok Innotec: leak in high vacuum valve. not a standard valve could take most of the day to fix Metalica: ok STS Dep: ok wbSOLVENT: ok wbgen- CTB: ok wbgen-LHP: ok wbgen-RHP: ok wbMETAL: ok wbNITRIDE: ok wbNONMETAL: ok wbDIFF: ok wbSILICIDE: ok wbGAASCL: ok wbMISCRES: ok wbOPTRES: ok DI WATER: ok NITROGEN: ok From jhaydon at snf.stanford.edu Fri Dec 6 12:46:41 2002 From: jhaydon at snf.stanford.edu (Jim Haydon) Date: Fri, 06 Dec 2002 12:46:41 -0800 Subject: Thinfilms morning report 12/06/02 Message-ID: <3DF10CB1.1ABF69F5@snf.stanford.edu> Balzers: ok Gryphon: ok Implanter: ok Innotec: leak in bellows on HV valve probably will be next week before it is repaired Metalica: ok STS Dep: ok wbSOLVENT: ok wbgen- CTB: ok wbgen-LHP: ok wbgen-RHP: ok wbMETAL: ok wbNITRIDE: ok wbNONMETAL: ok wbDIFF: ok wbSILICIDE: ok wbGAASCL: ok wbMISCRES: ok wbOPTRES: ok DI WATER: ok NITROGEN: ok From jhaydon at snf.stanford.edu Mon Dec 9 09:49:47 2002 From: jhaydon at snf.stanford.edu (Jim Haydon) Date: Mon, 09 Dec 2002 09:49:47 -0800 Subject: Thinfilms morning report 12/09/02 Message-ID: <3DF4D7BB.40B4D7F2@snf.stanford.edu> Balzers: ok Gryphon: ok Implanter: ok Innotec: leak in high vacuum valve waiting to hear from vendor may be down most of the week Metalica: ok STS Dep: ok wbSOLVENT: ok wbgen- CTB: ok wbgen-LHP: ok wbgen-RHP: ok wbMETAL: ok wbNITRIDE: ok wbNONMETAL: ok wbDIFF: ok wbSILICIDE: ok wbGAASCL: ok wbMISCRES: ok wbOPTRES: ok DI WATER: ok NITROGEN: ok From jhaydon at snf.stanford.edu Tue Dec 10 08:28:11 2002 From: jhaydon at snf.stanford.edu (Jim Haydon) Date: Tue, 10 Dec 2002 08:28:11 -0800 Subject: Thinfilms morning report 12/10/02 Message-ID: <3DF6161B.52855547@snf.stanford.edu> Balzers: ok Gryphon: ok Implanter: ok Innotec: leak in high vacuum valve waiting for information on replacement Metalica: ok STS Dep: ok wbSOLVENT: ok wbgen- CTB: ok wbgen-LHP: ok wbgen-RHP: ok wbMETAL: ok wbNITRIDE: ok wbNONMETAL: ok wbDIFF: ok wbSILICIDE: ok wbGAASCL: ok wbMISCRES: ok wbOPTRES: ok DI WATER: ok NITROGEN: ok From jhaydon at snf.stanford.edu Thu Dec 12 09:05:59 2002 From: jhaydon at snf.stanford.edu (Jim Haydon) Date: Thu, 12 Dec 2002 09:05:59 -0800 Subject: Thinfilms morning report 12/12/02 Message-ID: <3DF8C1F7.ACF21DF2@snf.stanford.edu> Balzers: ok Gryphon: ok Implanter: ok Innotec: Should have valve in sometime this afternoon Metalica: ok STS Dep: N2 Silane bottle change today should be back up Friday 12/13/02 wbSOLVENT: ok wbgen- CTB: ok wbgen-LHP: ok wbgen-RHP: ok wbMETAL: ok wbNITRIDE: ok wbNONMETAL: ok wbDIFF: ok wbSILICIDE: ok wbGAASCL: ok wbMISCRES: ok wbOPTRES: ok DI WATER: ok NITROGEN: ok From jhaydon at snf.stanford.edu Mon Dec 16 09:52:06 2002 From: jhaydon at snf.stanford.edu (Jim Haydon) Date: Mon, 16 Dec 2002 09:52:06 -0800 Subject: Thinfilms morning report 12/16/02 Message-ID: <3DFE12C6.69083621@snf.stanford.edu> Balzers: ok Gryphon: ok Implanter: ok Innotec: The Innotec will be shut down on Wed 12/18/02 through 1/2/02 in order to move it to a new location. Metalica: ok STS Dep: ok wbSOLVENT: ok wbgen- CTB: ok wbgen-LHP: ok wbgen-RHP: ok wbMETAL: ok wbNITRIDE: ok wbNONMETAL: ok wbDIFF: ok wbSILICIDE: ok wbGAASCL: ok wbMISCRES: ok wbOPTRES: ok DI WATER: ok NITROGEN: ok From jhaydon at snf.stanford.edu Mon Dec 16 10:57:24 2002 From: jhaydon at snf.stanford.edu (Jim Haydon) Date: Mon, 16 Dec 2002 10:57:24 -0800 Subject: Thinfilms morning report 12/16/02 Message-ID: <3DFE2214.E32DCD38@snf.stanford.edu> Balzers: ok Gryphon: ok Implanter: ok Innotec: Innotec will be shut down for relocation on Thur.12/19/02 through 1/3/02 Metalica: ok STS Dep: ok wbSOLVENT: ok wbgen- CTB: ok wbgen-LHP: ok wbgen-RHP: ok wbMETAL: ok wbNITRIDE: ok wbNONMETAL: ok wbDIFF: ok wbSILICIDE: ok wbGAASCL: ok wbMISCRES: ok wbOPTRES: ok DI WATER: ok NITROGEN: ok From jhaydon at snf.stanford.edu Tue Dec 17 11:27:31 2002 From: jhaydon at snf.stanford.edu (Jim Haydon) Date: Tue, 17 Dec 2002 11:27:31 -0800 Subject: Thinfilms morning report 12/17/02 Message-ID: <3DFF7AA3.EE971C9D@snf.stanford.edu> Balzers: ok Gryphon: ok Implanter: ok Innotec: ok Metalica: ok STS Dep: ok wbSOLVENT: ok wbgen- CTB: ok wbgen-LHP: ok wbgen-RHP: ok wbMETAL: ok wbNITRIDE: ok wbNONMETAL: ok wbDIFF: ok wbSILICIDE: ok wbGAASCL: ok wbMISCRES: ok wbOPTRES: ok DI WATER: ok NITROGEN: ok From jhaydon at snf.stanford.edu Tue Dec 17 16:47:53 2002 From: jhaydon at snf.stanford.edu (Jim Haydon) Date: Tue, 17 Dec 2002 16:47:53 -0800 Subject: Thinfilms morning report 12/17/02 Message-ID: <3DFFC5B9.45CE4E94@snf.stanford.edu> Balzers: ok Gryphon: power was some how shut off assuming an accidental EPO it should be back up tomorrow afternoon Implanter: ok Innotec: ok Metalica: ok STS Dep: ok wbSOLVENT: ok wbgen- CTB: ok wbgen-LHP: ok wbgen-RHP: ok wbMETAL: ok wbNITRIDE: ok wbNONMETAL: ok wbDIFF: ok wbSILICIDE: ok wbGAASCL: ok wbMISCRES: ok wbOPTRES: ok DI WATER: ok NITROGEN: ok From jhaydon at snf.stanford.edu Thu Dec 19 09:35:03 2002 From: jhaydon at snf.stanford.edu (Jim Haydon) Date: Thu, 19 Dec 2002 09:35:03 -0800 Subject: Thinfilms morning report 12/19/02 Message-ID: <3E020347.6143C81A@snf.stanford.edu> Balzers: ok Gryphon: probable bad relay board may not be up until after shut down Implanter: ok Innotec: The Innotec will be shut down this morning around 10:00 until 1/3/03 for relocation Metalica: ok STS Dep: ok wbSOLVENT: ok wbgen- CTB: ok wbgen-LHP: ok wbgen-RHP: ok wbMETAL: ok wbNITRIDE: ok wbNONMETAL: ok wbDIFF: ok wbSILICIDE: ok wbGAASCL: ok wbMISCRES: ok wbOPTRES: ok DI WATER: ok NITROGEN: ok