Balzers: ok Gryphon: ok Implanter: ok Innotec: leak in high vacuum valve. not a standard valve could take most of the day to fix Metalica: ok STS Dep: ok wbSOLVENT: ok wbgen- CTB: ok wbgen-LHP: ok wbgen-RHP: ok wbMETAL: ok wbNITRIDE: ok wbNONMETAL: ok wbDIFF: ok wbSILICIDE: ok wbGAASCL: ok wbMISCRES: ok wbOPTRES: ok DI WATER: ok NITROGEN: ok