Equipment Status

Jim Haydon jhaydon at
Wed Oct 2 15:58:00 PDT 2002

Balzers:    balzers cryo pump is dead and will need to be replaced
probably the week of 10/06/02
Gryphon:    ok
Implanter:    ok
Innotec:    shield change 10/03/02 should be back up early afternoon
Metalica:   regen completed should be usable around 7:00 -8:00
STS Dep:    ok
wbgen- CTB:    ok
wbgen-LHP:    ok
wbgen-RHP:    ok
wbMETAL:    ok
wbNITRIDE:    ok
wbNONMETAL:    ok
wbDIFF:    ok
wbSILICIDE:    ok
wbGAASCL:    ok
wbMISCRES:    ok
wbOPTRES:    ok
DI WATER:    ok

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