Equipment Status

Jim Haydon jhaydon at
Fri Oct 4 11:23:09 PDT 2002

Balzers:   Off line  dead cryo pump hoping to have a replacement next
Gryphon:    ok
Implanter:    ok
Innotec:     ok
Metalica:    ok
STS Dep:    ok
wbgen- CTB:    ok
wbgen-LHP:    ok
wbgen-RHP:    ok
wbMETAL:    ok
wbNITRIDE:    ok
wbNONMETAL:    ok
wbDIFF:    ok
wbSILICIDE:    ok
wbGAASCL:    ok
wbMISCRES:    ok
wbOPTRES:    ok
DI WATER:    ok

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