Equipment Status

Jim Haydon jhaydon at
Wed Oct 9 16:38:47 PDT 2002

Balzers:    dead cryo pump may be down for a couple of weeks do to bak
log at Austin Scientific
Gryphon:    ok
Implanter:    ok
Innotec:     ok
Metalica:    cryo pump being regend again possible operator error or
possible leak in helium lines. Could be a couple of days
STS Dep:    ok
wbgen- CTB:    ok
wbgen-LHP:    ok
wbgen-RHP:    ok
wbMETAL:    ok
wbNITRIDE:    ok
wbNONMETAL:    ok
wbDIFF:    ok
wbSILICIDE:    ok
wbGAASCL:    ok
wbMISCRES:    ok
wbOPTRES:    ok
DI WATER:    ok

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